

設計規範
| Material | Ceramics(AlN&Si3N4)、Glass、Fused silica |
| Drilling via(TGV) | 10um~25um、50um~100um |
| Cross-section shape |
Straight / Taper |
| Aspect Ratio | 16 : 1 |
| Ball Pad Size | 100um~650um |
| Ball Pad Pitch | 150um~250um |
| Line Space | 10/10um |
| Film thickness | 1~3um |
| RDL Design | 2L~6L |