設計規範
Material | Ceramics(AlN&Si3N4)、Glass、Fused silica |
Drilling via(TGV) | 10um~25um、50um~100um |
Cross-section shape |
Straight / Taper |
Aspect Ratio | 16 : 1 |
Ball Pad Size | 100um~650um |
Ball Pad Pitch | 150um~250um |
Line Space | 10/10um |
Film thickness | 1~3um |
RDL Design | 2L~6L |